Directional Repetitive Control of a Metrological AFM
نویسندگان
چکیده
منابع مشابه
Identification, Control and Hysteresis Compensation of a 3 Dof Metrological Afm
Atomic Force Microscopes (AFMs) are widely used for the investigation of samples at the nanometer scale. The metrological AFM used in this work uses a 3 degrees-of-freedom (DOFs) stage, driven by piezo-stack actuators, for sample manipulation in combination with a fixed cantilever. The piezostack actuators suffer from hysteresis, which acts as a nonlinear disturbance on the system and/or can ch...
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15 صفحه اولComparison of Repetitive Control Schemes
X nx1 system state matrix A nxn state transition matrix (possible time varying) Bnxm input matrix (possibly time varying) U mx1 input of system inputs Uideal mx1 matrix defining the input required to force perfect tracking. Xref nx1 matrix defining the path the states are to follow, periodic in time T. T The period of the repetitive motion: Xref(t)=Xref(t+T) W(t) Basis function for determining ...
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ژورنال
عنوان ژورنال: IEEE Transactions on Control Systems Technology
سال: 2011
ISSN: 1063-6536,1558-0865
DOI: 10.1109/tcst.2010.2091642